Dimensional metrology & roughness measurement
InfiniteFocus
Users benefit from a 3D surface measurement system that combines dimensional metrology and surface roughness measurement in one system. Users achieve traceable measurement results in a high repeatability and a vertical resolution of up to 10nm. The robust measurement principle of Focus Variation in combination with a vibration-isolating hardware enables the form and roughness measurement of also large and heavy components. All axes of InfiniteFocus are equipped with highly accurate encoders ensuring precise stage movement. With an automation interface, InfiniteFocus is also applied for fully automatic measurement in production.
Technical Specifications
| Measurement principle | non-contact, optical, three-dimensional, based on Focus-Variation |
| Positioning volume (X x Y x Z) | 100 mm x 100 mm x 100 mm = 1000000 mm3 (optional: 200 mm x 200 mm x 100 mm = 4000000 mm³) |
| Objective magnification | 2.5x | 5x | 10x HX | 10x | 20x HX | 20x | 50x | 100x | |
| Working distance | mm | 8.8 | 23.5 | 37 | 17.5 | 30 | 19 | 11 | 4.5 |
|
Lateral measurement range (X,Y) (X x Y) |
mm mm² |
5.63 31.7 |
2.82 7.85 |
1.62 2.62 |
1.62 2.62 |
0.7 0.49 |
0.81 0.66 |
0.32 0.10 |
0.16 0.03 |
| Vertical resolution | nm | 2300 | 410 | 250 | 100 | 80 | 50 | 20 | 10 |
| Height step accuracy (1 mm) | % | n.a. | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
|
Max. measurable area Optional |
mm² mm² |
10000 40000 |
10000 40000 |
10000 40000 |
10000 40000 |
10000 24780 |
10000 24780 |
3965 3965 |
990 990 |
| Min. measurable roughness (Ra) | µm | 7 | 1.2 | 0.75 | 0.3 | 0.24 | 0.15 | 0.06 | 0.03 |
| Min. measurable roughness (Sa) | µm | 3.5 | 0.6 | 0.375 | 0.15 | 0.12 | 0.075 | 0.03 | 0.015 |
| Min. measurable radius | µm | 20 | 10 | 5 | 5 | 3 | 3 | 2 | 1 |
For more information download the product flyer or send us a request.
High measuring point density
Up to 500 million measurement points ensure a meticulously detailed measurement with tolerances in the μm and sub-μm range along with large working distance. The high measurement point density of Focus-Variation enables operators to gain a consistently high lateral and vertical resolution across high measurement volumes.
Measurement of steep flanks
Light coming from different directions is used to positively influence a measurement. The measurement of the maximum flank angle is not restricted by the numerical aperture of an objective. Depending on the surface users measure surfaces with slope angles up to 87°.
Full form measurement with Real3D
Using Real3D, users measure surfaces from numerous perspectives. Single measurements are automatically merged into a full 3D dataset. High-precision and calibrated rotation and tilt axes ensure automated, repeatable and traceable measurement on the whole measurement object.
Focus-Variation Technology
Alicona measurement systems are based on the technology of Focus-Variation and combine the functionalities of a surface roughness measurement device and a form measurement system. Each Alicona measurement instrument is a surface measurement device, surface roughness measurement system, 3D measurement system for geometrical tolerancing and micro coordinate measurement system. The Focus-Variation technology combines the small depth of focus of an optical system with vertical scanning to provide topographical and color information from the variation of focus. The main component of the system is a precision optics containing various lens systems that can be equipped with different objectives, allowing measurements with different resolution.
